earticle

스퍼터링법에 의해 제조된 ITO 박막필름에 있어서 증착조건에 따른 전기특성에 관한 연구

박지웅, 김철경, 김문선

한국EHS평가학회 한국EHS평가학회지 Vol.5 No.4 2007.12 pp.47-54

Study of Magnetic Field Shielded Sputtering Process as a Room Temperature High Quality ITO Thin Film Deposition Process

Lee, Jun-Young, Jang, Yun-Sung, Lee, You-Jong, Hong, Mun-Pyo

[Kisti 연계] 한국진공학회 한국진공학회 학술대회논문집 2011 pp.288-289

New Approaches for Overcoming Current Issues of Plasma Sputtering Process During Organic-electronics Device Fabrication: Plasma Damage Free and Room Temperature Process for High Quality Metal Oxide Thin Film

Hong, Mun-Pyo

[Kisti 연계] 한국진공학회 한국진공학회 학술대회논문집 2012 pp.100-101

Reactive Sputtering Process for $CuIn_{1-x}Ga_xSe_2$ Thin Film Solar Cells

Park, Nae-Man, Lee, Ho Sub, Kim, Jeha

[Kisti 연계] 한국전자통신연구원 ETRI journal Vol.34 No.5 2012 pp.779-782

RF-magnetron Sputtering Process를 이용한 a-축 우선 배향된 PLZT(x/0/100)박막의 제조

박명식, 강승국, 노광수, 김동범, 조상희

[Kisti 연계] 한국재료학회 한국재료학회지 Vol.7 No.6 1997 pp.522-528

Development of Plasma Damage Free Sputtering Process for ITO Anode Formation Inverted Structure OLED

Lee, You-Jong, Jang, Jin-N., Yang, Ie-Hong, Kim, Joo-Hyung, Kwon, Soon-Nam, Hong, Mun-Pyo, Kim, Dae-C., Oh, Koung-S., Yoo, Suk-Jae, Lee, Bon-J.

[Kisti 연계] 한국정보디스플레이학회 한국정보디스플레이학회 학술대회논문집 2008 pp.1323-1324

Effects of Ta addition in Co-sputtering Process for Ta-doped Indium Tin Oxide Thin Film Transistors

박시내, 손대호, 김대환, 강진규

[Kisti 연계] 한국진공학회 한국진공학회 학술대회논문집 2012 p.334

Size-controlled Growth of Fe Nanoparticles in Gas Flow Sputtering Process

Sakuma, H., Aoshima, H., Ishii, K.

[Kisti 연계] 한국자기학회 Journal of magnetics Vol.11 No.3 2006 pp.103-107

MICROSTRUCTURAL EVOLUTION OF IN FLMS DEPOSITED BY HIGH TEMPERATURE SPUTTERING PROCESS

Kwak, Noh-Jung, Shin, Chan-Soo, Yu, Sang-Ho, Kim, Chung-Tae

[Kisti 연계] 한국재료학회 Fabrication and Characterization of Advanced Materials Vol.2 No.e2 1995 pp.819-824

Improvement in the Setup of the Inline Sputter System and the ITO Sputtering Process by Measuring and Controlling the Base Vacuum Level

Ahn, Min-Hyung, Cho, Eou-Sik, Kwon, Sang-Jik

[Kisti 연계] 한국정보디스플레이학회 Journal of information display Vol.9 No.4 2008 pp.15-20

Gas Barrier Properties of Nanolaminated Single Inorganic Film Deposited by Neutral Beam Assisted Sputtering Process

Jang, Yun-Sung, Lee, You-Jong, Hong, Mun-Pyo

[Kisti 연계] 한국진공학회 한국진공학회 학술대회논문집 2012 p.465

The properties of nanocomposite Al-Ti-X-N (X=Cu, Si) coating synthesized by magnetron sputtering process with single composite target

김준형, 정덕형, 변철웅, 문경일

[Kisti 연계] 한국진공학회 한국진공학회 학술대회논문집 2010 p.235

Characteristics of flexible indium tin oxide electrode grown by continuous roll-to-roll sputtering process for flexible displays

Choi, Kwang-Hyuk, Cho, Sung-Woo, Jeong, Jin-A, Kim, Han-Ki

[Kisti 연계] 한국정보디스플레이학회 한국정보디스플레이학회 학술대회논문집 2008 pp.605-608

The depositing characteristics of amorphous carbon thin films by a reactive particle beam assisted sputtering process

이태훈, 신유철, 권광호

[Kisti 연계] 한국전기전자재료학회 한국전기전자재료학회 학술대회논문집 2008 p.123

Characterization and Formation Mechanism of Zr-Cu and Zr-Cu-Al Metallic Glass Thin Film by Sputtering Process

Lee, Chang-Hun, Sun, Ju-Hyun, Moon, Kyoung-Il, Shin, Seung-Yong

[Kisti 연계] 한국진공학회 한국진공학회 학술대회논문집 2012 pp.271-272

Cu2ZnSn(S,Se)4 Thin Film Solar Cells Fabricated by Sulfurization of Stacked Precursors Prepared Using Sputtering Process

Gang, Myeng Gil, Shin, Seung Wook, Lee, Jeong Yong, Kim, Jin Hyeok

[Kisti 연계] 한국진공학회 한국진공학회 학술대회논문집 2013 p.97

Stress Effects of CoCr$_2$O$_4$ Film on MgO and MgAl$_2$O$_4$ Grown by RF-Sputtering Process

Ko, Hoon, Choi, Kang-Ryong, Park, Seung-Iel, Shim, In-Bo, Kim, Sam-Jin, Kim, Chul-Sung

[Kisti 연계] 한국자기학회 한국자기학회 학술대회논문집 2008 p.120

Variations of Interface Potential Barrier Height and Leakage Current of (Ba, Sr)$TiO_3$ Thin Films Deposited by Sputtering Process

Hwang, Cheol-Seong, Lee, Byoung-Taek

[Kisti 연계] 한국세라믹학회 The Korean journal of ceramics Vol.2 No.2 1996 pp.95-101

High Quality Nano Structured Single Gas Barrier Layer by Neutral Beam Assisted Sputtering (NBAS) Process

Jang, Yun-Sung, Lee, You-Jong, Hong, Mun-Pyo

[Kisti 연계] 한국진공학회 한국진공학회 학술대회논문집 2012 pp.251-252

Se-loss-induced CIS Thin Films in RTA Process after Co-sputtering Using CuSe<SUB>2 and InSe<SUB>2 Targets

Kim, Nam-Hoon, Jun, Young-Kil, Cho, Geum-Bae

[Kisti 연계] 대한전기학회 Journal of electrical engineering & technology Vol.9 No.3 2014 pp.1009-1015