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Vibration Measurement Using a Fringe Pattern in Reflective Monochromatic Interferometry

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[Kisti 연계] 한국광학회 Journal of the Optical Society of Korea Vol.19 No.5 2015 pp.494-502

Methods to Measure the Critical Dimension of the Bottoms of Through-Silicon Vias Using White-Light Scanning Interferometry

Hyun, Changhong, Kim, Seongryong, Pahk, Heuijae

[Kisti 연계] 한국광학회 Journal of the Optical Society of Korea Vol.18 No.5 2014 pp.531-537

3D Measurement of TSVs Using Low Numerical Aperture White-Light Scanning Interferometry

Jo, Taeyong, Kim, Seongryong, Pahk, Heuijae

[Kisti 연계] 한국광학회 Journal of the Optical Society of Korea Vol.17 No.4 2013 pp.317-322

Development of computer aided calibration module for CMMS and machine tools using a compensated step gauge

Pahk, Heuijae, Kim, Jonghoo

[Kisti 연계] 한국경영과학회 한국경영과학회 학술대회논문집 1992 pp.444-453