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반도체 Wafer 공정용 불산 제어 밸브 모듈 개발에 관한 연구

원문정보

A Study on the Development of Hydrofluoric Acid Control Valve Module for Semiconductor Wafer Process

김호건, 유승현, 오성훈, 소병문

피인용수 : 0(자료제공 : 네이버학술정보)

초록

영어

In this study, we intend to develop a control valve with oxidation resistance for hydrogen fluoride that can be applied to the semiconductor production process. Operated Valves currently in use is a form of assembling an air cylinder to the valve body. These valves generally have a cylinder body made of aluminum (Al), so they may corrode depending on the external environment, and the solution leaks along the rod inside the cylinder, causing damage to parts due to corrosion. To solve this problem, the valve plug shape was developed by devising and applying a plug using a valve different from the existing method, and it is possible to block the inflow of hydrogen fluoride into the valve control unit, thereby preventing damage to parts as well as maintaining stable valve operation.

목차

ABSTRACT
1. 서론
2. Valve 설계
2.1 Valve 형상 설계 및 제작
2.2 Valve plug 제작
2.3 Valve 내 유동 해석
4. 결론
후기
References

저자정보

  • 김호건 Ho-Geon Kim. graduate student, Chonbuk National University, Dept, Mechanical system engineering
  • 유승현 Seung-Hyeon You. graduate student, Chonbuk National University, Dept, Mechanical system engineering
  • 오성훈 Sung-Hoon Oh. graduate student, Chonbuk National University, Dept, Mechanical system engineering
  • 소병문 Byung-Moon So. Professor, Chonbuk National University, Dept, of IT Applied system engineering

참고문헌

자료제공 : 네이버학술정보

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