원문정보
Complex Resist Pattern Collapse with Mechanical Modeling
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Abstract
1. INTRODUCTION
2. PATTERN COLLAPSE PHFNOMENON MODELING
2.1 Bend Phenomenon Analysis
2.2 Bend Phenomenon Simulation Procedure and Result
2.3 Pattern Break Simulation
2.4 Pattern Tear Phenomenon Analysis
3. CONCLUSION
Reference
Abstract
1. INTRODUCTION
2. PATTERN COLLAPSE PHFNOMENON MODELING
2.1 Bend Phenomenon Analysis
2.2 Bend Phenomenon Simulation Procedure and Result
2.3 Pattern Break Simulation
2.4 Pattern Tear Phenomenon Analysis
3. CONCLUSION
Reference
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자료제공 : 네이버학술정보