earticle

Three-dimensional Self-consistent Particle-in-cell and Monte Carlo Collisional Simulation of DC Magnetron Discharges

Kim, Seong-Bong, Chang, Hyon-U, Yoo, Suk-Jae, Oh, Ji-Young, Park, Jang-Sik

[Kisti 연계] 한국진공학회 한국진공학회 학술대회논문집 2012 p.526

Development of Nano Crystal Embedded Polymorphous Silicon Thin Film by Neutral Beam Assisted CVD Process at Room Temperature

Jang, Jin-Nyoung, Lee, Dong-Hyeok, So, Hyun-Wook, Yoo, Suk-Jae, Lee, Bon-Ju, Hong, Mun-Pyo

[Kisti 연계] 한국진공학회 한국진공학회 학술대회논문집 2012 p.171

Effects of Neutral Particle Beam on Nano-Crystalline Silicon Thin Film Deposited by Using Neutral Beam Assisted Chemical Vapor Deposition at Room Temperature

Lee, Dong-Hyeok, Jang, Jin-Nyoung, So, Hyun-Wook, Yoo, Suk-Jae, Lee, Bon-Ju, Hong, Mun-Pyo

[Kisti 연계] 한국진공학회 한국진공학회 학술대회논문집 2012 pp.254-255

Alumina dummy 충전재를 이용한 GaN 기반 박막재료의 단면 TEM 시편준비

오상호, 최주형, 송경, 정종만, 김진규, 유인근, 유석재, 김영민

[Kisti 연계] 한국현미경학회 Applied microscopy Vol.39 No.3 2009 pp.277-281

Novel deposition technology for nano-crystalline silicon thin film at low temperature by hyper-thermal neutral beam assisted CVD system

Jang, Jin-Nyoung, Song, Byoung-Chul, Oh, Kyoung-Suk, Yoo, Suk-Jae, Lee, Bon-Ju, Choi, Soung-Woong, Park, Young-Chun, Hong, Mun-Pyo

[Kisti 연계] 한국정보디스플레이학회 한국정보디스플레이학회 학술대회논문집 2009 pp.1025-1027

Measurement of Electron Temperature of ECR Plasma by using Helium Line Intensity Ratios

Kim, Seong-Bong, Kim, Dae-Chul, Yoo, Suk-Jae, Cho, Moo-Hyun, NamKung, Won

[Kisti 연계] 한국진공학회 한국진공학회 학술대회논문집 2009 p.264

Hyperthermal 중성빔을 이용한 HIT cell용 Si 박막 형성 및 계면특성

오경숙, 최성웅, 김대철, 김종식, 김영우, 유석재, 홍문표, 박영춘, 이봉주

[Kisti 연계] 한국신재생에너지학회 한국신재생에너지학회 학술대회논문집 2008 pp.394-396

Development of Plasma Damage Free Sputtering Process for ITO Anode Formation Inverted Structure OLED

Lee, You-Jong, Jang, Jin-N., Yang, Ie-Hong, Kim, Joo-Hyung, Kwon, Soon-Nam, Hong, Mun-Pyo, Kim, Dae-C., Oh, Koung-S., Yoo, Suk-Jae, Lee, Bon-J.

[Kisti 연계] 한국정보디스플레이학회 한국정보디스플레이학회 학술대회논문집 2008 pp.1323-1324

Properties of Si thin films by hyperthermal neutral beam

Oh, Kyoung-Suk, Choi, Sung-Woong, Kim, Dae-Chul, Yoo, Suk-Jae, Park, Young-Chun, Hong, Mun-Pyo, Kim, Young-Woo, Lee, Bon-Ju

[Kisti 연계] 한국진공학회 한국진공학회 학술대회논문집 2008 p.316

Hyper Neutral Beam System for Damage Free Deposition of Indium-Tin Oxide Thin Films at Room Temperature

Yoo, Suk-Jae, Kim, Dae-Chul, Kim, Jong-Sik, Oh, Kyoung-Suk, Lee, Bong-Ju, Choi, Soung-Woong, Park, Young-Chun, Jang, Jin-Nyoung, Hong, Mun-Pyo

[Kisti 연계] 한국정보디스플레이학회 한국정보디스플레이학회 학술대회논문집 2007 pp.190-192

Development of High Performance Indium Tin Oxide Films at Room Temperature by Plasma-Damage Free Neutral Beam Sputtering System

Jang, Jin-Nyoung, Oh, Kyoung-Suk, Yoo, Suk-Jae, Kim, Dae-Chul, Lee, Bon-Ju, Yang, Ie-Hong, Moon, Ji-Sun, Kim, Jong-Sik, Choi, Soung-Woong, Park, Young-Chun, Hong, Mun-Pyo

[Kisti 연계] 한국정보디스플레이학회 한국정보디스플레이학회 학술대회논문집 2007 pp.1715-1718