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Silicon/Pad Pressure Measurements During Chemical Mechanical Polishing

Danyluk, Steven, Ng, Gary, Yoon, In-Ho, Higgs, Fred, Zhou, Chun-Hong

[Kisti 연계] 한국윤활학회 한국윤활학회 학술대회논문집 2002 pp.433-434

Dishing and Erosion in Chemical Mechanical Polishing of Electroplated Copper

Yoon, In-Ho, Ng, Sum Huan, Hight, Robert, Zhou, Chunhong, Higgs III, C. Fred, Yao, Lily, Danyluk, Steven

[Kisti 연계] 한국윤활학회 한국윤활학회 학술대회논문집 2002 pp.435-437

Dependence of Dishing on Fluid Pressure during Chemical Mechanical Polishing

Higgs III, C. Fred, Ng, Sum Huan, Zhou, Chunhong, Yoon, In-Ho, Hight, Robert, Zhou, Zhiping, Yap, LipKong, Danyluk, Steven

[Kisti 연계] 한국윤활학회 한국윤활학회 학술대회논문집 2002 pp.441-442