earticle

영어

Artificial intelligence is crucial to manufacturing productivity. Understanding the difficulties in producing disruptions, especially in linear feed robot systems, is essential for efficient operations. These mechanical tools, essential for linear movements within systems, are prone to damage and degradation, especially in the LM guide, due to repetitive motions. We examine how explainable artificial intelligence (XAI) may diagnose wafer linear robot linear rail clearance and ball screw clearance anomalies. XAI helps diagnose problems and explain anomalies, enriching management and operational strategies. By interpreting the reasons for anomaly detection through visualizations such as Class Activation Maps (CAMs) using technologies like Grad-CAM, FG-CAM, and FFT-CAM, and comparing 1D-CNN with 2D-CNN, we illustrates the potential of XAI in enhancing diagnostic accuracy. The use of datasets from accelerometer and torque sensors in our experiments validates the high accuracy of the proposed method in binary and ternary classifications. This study exemplifies how XAI can elucidate deep learning models trained on industrial signals, offering a practical approach to understanding and applying AI in maintaining the integrity of critical components such as LM guides in linear feed robots.