원문정보
초록
영어
In the semiconductor manufacturing clean room, contamination that directly affects process yield is managed through the operation of a monitoring system that measures molecular contamination in the air. In this study, I presented the component inspection method, test conditions, and judgment criteria through the life test of the solenoid valve that will be applied to the sampling module of the AMC Monitoring System.
목차
ABSTRACT
1. 서론
2. 본론
2.1 AMC monitoring System
2.2 Sampling Module
2.3 Solenoid Valve
3. 실험 및 방법
3.1 Diaphragm 고무재료 검사 항목(KS B 8217)
3.2 Diaphragm 성형 검사항목
3.3 Actuator 검사항목
3.4 Solenoid Valve Tun Test
4. 결과 및 고찰
5. 결론
References
1. 서론
2. 본론
2.1 AMC monitoring System
2.2 Sampling Module
2.3 Solenoid Valve
3. 실험 및 방법
3.1 Diaphragm 고무재료 검사 항목(KS B 8217)
3.2 Diaphragm 성형 검사항목
3.3 Actuator 검사항목
3.4 Solenoid Valve Tun Test
4. 결과 및 고찰
5. 결론
References
키워드
저자정보
참고문헌
자료제공 : 네이버학술정보