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학술연구

플라즈마 중합법으로 제작한 Styrene 절연막의 전하 포집에 대한 연구

원문정보

A Study on Charge Storage Effect of Plasma Polymerized Styrene Thin Films

김희성, 신백균

피인용수 : 0(자료제공 : 네이버학술정보)

초록

영어

Plasma polymerized Styrene thin films were used as a memory layer in a memory device. As for the memory layer, a ppS thin films were used for the organic memory device and their charge storage characteristic was investigated comparatively, where the charge storage effect was evaluated by a hysteresis voltage. The organic memory device with ppS thin film of 30nm and 50nm as memory layer showed promising memory characteristics such as hysteresis voltage of 20V and 28V. The ppS revealed promising charge storage properties which confirms that an organic memory device without floating gate could be successfully implemented by using the ppS thin film as a memory layer.

목차

ABSTRACT
1. 서론
2. 실험 방법
2.1 플라즈마 중합법
2.2 소자 제작
2.3 측정 방법
3. 실험 결과
3.1 ppS layer의 pressure에 따른 증착률
3.2 ppS layer 기판 bias에 따른 증착률
3.3 ppS layer의 두께에 따른 Hysteresis 비교
3. 결론
References

저자정보

  • 김희성 Hee-Sung Kim. Professor, The Department of Electrical and Computer Engineering at Inha University
  • 신백균 Paik-Kyun Shin. Member, Professor, The Department of Electrical and Computer Engineering at Inha University

참고문헌

자료제공 : 네이버학술정보

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