원문정보
초록
영어
Microcrystalline silicon thin film solar cells are fabricated with laser-assisted plasma enhanced chemical vapor deposition (LAPECVD) system at low temperature. An LAPECVD system is a unique combination of such developments that utilizes both laser and plasma to assist the relevant chemical reactions. To optimize the performance of the silicon thin film solar cell, microcrystalline intrinsic thin film was inserted as absorption of the solar cell. Therefore, the performance efficiency was upgraded from 6.04 mA/cm2 to 7.01 mA/cm2, which says that solar cells fabricated with LAPECVD have higher efficiency and better for the environment with less use of solar power making more usable energy.
목차
1. MATERIALS AND EXPERIMENT METHODS
2. Results and Discussion
3. Conclusion
4. Acknowledgements
5. References
