원문정보
피인용수 : 0건 (자료제공 : 네이버학술정보)
목차
ABSTRACT
1. Introduction
2. Chip planarization
2.1. CMOS chip preparation
2.2. Planartzation process
3. Etching process
3.1. Metal masking
3.2. Vla-hole etching
4. Conclusion
Referencess
1. Introduction
2. Chip planarization
2.1. CMOS chip preparation
2.2. Planartzation process
3. Etching process
3.1. Metal masking
3.2. Vla-hole etching
4. Conclusion
Referencess
저자정보
참고문헌
자료제공 : 네이버학술정보