원문정보
A Study on the Experiment of Capacitive Sensor in Nano and Ball Screw Stage
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초록
영어
The capacitive sensors can be divided into two categories depending on their performance and intended use. First, high resolution sensors are commonly used in displacement and position monitoring applications where high precision, high stability, and low temperature drift are required. Often these sensors are used in process monitoring and closed loop feedback control systems. Second, proximity capacitive sensors are much cheaper and generally used for sensing the presence of parts or for counting applications. The following paper describes characteristics of capacitive sensor and application to the PZT nano and ball screw stage.
목차
ABSTRACT
1. 서론
2. 용량 센서와 특성
3. 나노 스테이지 실험
4. 볼나사 스테이지 실험
5. 결론
후기
References
1. 서론
2. 용량 센서와 특성
3. 나노 스테이지 실험
4. 볼나사 스테이지 실험
5. 결론
후기
References
키워드
- Nano stage(나노 스테이지)
- Ball screw stage(볼나사 스테이지)
- Apacitive sensor(커패시티브 센서)
저자정보
참고문헌
자료제공 : 네이버학술정보