원문정보
피인용수 : 0건 (자료제공 : 네이버학술정보)
초록
영어
There are increasingly urgent needs for low power, high performance, and low cost environmental sensor in environmental concentrator industry. A new type of MEMS environmental sensor based on MEMS thin film resistor and heat transduction is designed. Using clean room technology processing micron-size chip, help reduce post-production costs. Preliminary experiment results demonstrate that the output voltage signal is proportional to the environmental concentration in normal working range, and the detection accuracy can reach less than 1%.
목차
Abstract
1. Introduction
High Environmental Concentrations Sensor
Environmental Detection Based on MEMS Chip
MEMS Chip and Testing
Monitoring System Design
Library Based on ZigBee Technology Monitoring System
Conclusion
References
1. Introduction
High Environmental Concentrations Sensor
Environmental Detection Based on MEMS Chip
MEMS Chip and Testing
Monitoring System Design
Library Based on ZigBee Technology Monitoring System
Conclusion
References
키워드
저자정보
참고문헌
자료제공 : 네이버학술정보