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영어

In this paper we focused on mathematical formulation for capacitive pressure sensor. The most important parameter of every sensor are deflection on the application of applied pressure, variation of capacitance on deflection and sensitivity. Here we mathematically drive equation for every parameter. This article help researcher to develop MEMS based capacitive pressure sensor for particular application. For that purpose we also vary the thickness of sensing diaphragm. Our study in this article is mainly consider only case of pressure sensor in normal mode. Mostly researcher use FEM method for design and simulation of capacitive pressure sensor but using these equation they can easily design any sensor by changing the parameter of equation. The material for diaphragm is Si and for insulation layer is SiO₂ is taken in this article.