earticle

영어

We obtained in-situ MgBz thin films in an one-step process using ESSD (Evaporation Sputtering Simultaneous Deposition) method. In our approach, the Ma evaporator is designed specially. Mg and B are simultaneously evaporated and sputtered, respectively, in the specially designed ESSD chamber. The background pressure was less than 1 x 10-6 Torr. The substrate temperature was kept at 623 K. The film properties were investigated by both electrical resistivity and PPMS. As a result, typical Tc of films was 11 K.