원문정보
초록
영어
This paper reported a double layer cantilever harvester powered for vibration energy. A space layer between the PZT beam and the support silicon beam is existed, leading to the double layer cantilever structure. Such structure can allow the more strain generated by the piezoelectric layer due to the existing of space layer, and the output voltage is further increased. The formula of output voltage is then derived from the piezoelectric effect equation and vibration model. And the formula verifies the relationship of voltage and structure parameter. And the simulation in micrometer lever is used to discuss the relationship. Finally, the prototype is assembled and measured to verify the feature of the device. Experimentally, the 3.8V output voltage and 16.9uW output power is acquired.
목차
1. Introduction
2. Modeling and Analysis
3. Optimum Design
4. Measurement
5. Conclusions
ACKNOWLEDGEMENTS
References
