원문정보
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초록
영어
Lead zirconate titanate (PZT) is significant material in electrical and optical devices for their ferroelectric, piezoelectric and dielectric properties. In this research, PZT films were fabricated by reactive RF co-sputtering method using Pb, Zr, and Ti targets. From XPS study, lead, zirconium, and titanium are successfully deposited on Si(100) substrate. Thickness of PZT films was measured with a surface profiler and the thickness was decreased as the oxygen gas ratio increased in the sputter gas.
목차
Abstract
1. Introduction
2. Experimental Section
3. Results and Discussion
3.1. Optimization
3.2. Deposition of PZT Films
4. Conclusions
Acknowledgements
References
1. Introduction
2. Experimental Section
3. Results and Discussion
3.1. Optimization
3.2. Deposition of PZT Films
4. Conclusions
Acknowledgements
References
저자정보
참고문헌
자료제공 : 네이버학술정보