원문정보
초록
영어
With widely application of nanomanipulation, the design requirements of nanomanipulation control system is higher and higher. To improve the control precision of nano-components, it is important to do research on closed-loop control method for nanomanipulation. The piezoelectric ceramic actuator has the inherent characteristic of hysteresis, creep and nonlinear. Attocube is adopted as piezoelectric ceramic actuator in this system. Aiming at the designed nanomanipulation system based on Attocube, the closed-loop nanomanipulation control method based on fuzzy PID is studied. Based on the simplified modeling of piezoelectric devices and its displacement model, the controller of nano-manipulation system is designed and its simulation based on Matlab is conducted. Simulational results prove the effectiveness of the method.
목차
1. Introduction
2. Nanomanipulation system based on piezoelectric ceramic actuator(Attocube)
3. Modelling of the Attocube nanomanipulation system
3.1. Modelling of the Auttocbe driver
3.2. Establishment of Attocube displacement model
4. Design of Fuzzy PID controller
5. Simulation model of Nanomanipulation control system
6. Analysis of Simulation Results
6.1. Characteristics comparison of step response
6.2. Characteristics comparison of sine signal tracking
7. Conclusions
Acknowledgements
References