earticle

영어

In the semiconductor manufacturing process, many factors lead to lower transference numbers and DT. Especially, this occurs due to the temperature changes of essential chemicals such as acid and solvent and the rate is constantly increasing. Thus, it is required to develop equipment to improve transference numbers and DT properties and the work efficiency of process engineers by maintaining constant temperature of chemicals used in the manufacturing process and by controlling multiple circulators. This study developed DWCCS which engineers operate by remote control with multiple facilities and which maintains constant temperature of chemicals used in semiconductor device manufacturing facilities and processes.