원문정보
초록
영어
1:1 and 2:1 adducts of trimethylgallium (TMGa) with 4-dimethylaminopyridine (DMAP) were synthesized and characterized by 1H, 13C NMR, FAB-MS and Trace elemental analyses using ICP-MS. Both adducts are non-pyrophoric, thermally dissociable and easy to handle. FAB-MS study suggests that the adducts are associated in tetrameric forms. TMGa of purity more than 99.999% (5N) was released from these adducts, which shows the adducts are potential candidates to produce high pure metal alkyl sources for Metal-Organic Chemical Vapor Deposition (MOCVD).
목차
Abstract
1. Introduction
2. Experimental Sections
2.1 Synthesis of 4-dimethylaminopyridine.trimethylgallium Adduct (I):
2.2 Synthesis of hexamethyl-μ-[4-dimethylaminopyridine] digallium (II):
2.3 Thermal Cracking of Adducts to Release TMGa:
3. Results and Discussion
5. Conclusions
References
1. Introduction
2. Experimental Sections
2.1 Synthesis of 4-dimethylaminopyridine.trimethylgallium Adduct (I):
2.2 Synthesis of hexamethyl-μ-[4-dimethylaminopyridine] digallium (II):
2.3 Thermal Cracking of Adducts to Release TMGa:
3. Results and Discussion
5. Conclusions
References