earticle

영어

This paper studies the optimum design of piezo-driven compliant motion stage. The flexure hinge for designing motion amplification structures has been widely used on conventional piezo stages. The novel 'cross hinge' is more flexible than the flexure hinge, allowing for large motion amplification and less resistance to motion which is ideal for a compliant motion stage. As simulation results, the newly designed stage has superior performance over traditionally designed stages in terms of motion amplification, allowing for larger motion ranges.