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The purpose of this research is to examine the factors affecting the incidence of new high technology firms in Research Triangle Region, North Carolina. Using a recent start-up firm database and employing the event history analysis technique, the study finds that the number of high-tech businesses and the proportion of small high-tech firms to all firms are two significant regional factors affecting the incidence of new high-tech firms. The results of multi-variate logit regression analysis support the argument that the incidence of new high-tech firms in a region is likely to be a multi-causal process wherein no single factor is identifiable as sufficient to generate a significant level of high-tech entrepreneurial activity. These results are consistent with high-technology and regional development theories based on professional labor markets and localized knowledge spill-overs.