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논문검색

Performance improvement of 2 stage GM-type pulse tube Cryocooler for cryopump

초록

영어

This paper describes experimental study and performance improvement of 2 stage Gifford-McMahon (G-M) type pulse tube cryocooler for cryopump. The objective of this study is to improve the efficiency of 2 stage pulse tube cryocooler for substituting 2 stage G-M cryocooler used in cryopump. The target cooling capacities are 5 W at 20 K and 35 W at 80 K for the 1st and the 2nd stage, respectively. These values are good cooling capacities for vacuum level in medium size ICP 200 cryopump. Design of the 2 stage pulse tube cryocooler is conducted by FZKPTR(Forschungs Zentrum Karlsruhe Pulse Tube Refrigerator) program. In order to improve the performance of 2 stage pulse tube cryocooler, U-type pulse tube cryocooler is fabricated and connecting tubes are minimized for reducing dead volumes and pressure losses. Also, to get larger capacities, orifice valves and double inlet valves are optimized and the compressor of 6 kW is used. On the latest unit, the lowest temperatures of 2 stage pulse tube cryocooler are 42 K (1st stage) and 8.3 K (2nd stage) and the cooling capacities are 40 W at 82.9 K (1st stage) and 10 W at 20.5 K (2nd stage) with 6.0 kW of compressor input power. This pulse tube cryocooler is suited for commercial medium size cryopump. In performance test of cryopump with 2 stage pulse tube cryocooler, pumping speed for gaseous nitrogen is 4,300 L/s and the ultimate vacuum pressure is 7.5  10-10 mbar.

목차

Abstract
 1. INTRODUCTION
 2. DESCRIPTION OF CRYOPUMP
 3. PULSE TUBE CRYOCOOLER
 4. TEST RESULTS OF THE CRYOPUMP
  4.1 Fabrication of the cryopump
  4.2 Pumping speed and ultimate pressure of the cryopump
 5. SUMMARY
 ACKNOWLEDGMENT
 REFERENCES

저자정보

  • Seong-Je Park Energy Systems Research Division, Korea Institute of Machinery & Materials
  • Deuk-Yong Koh Energy Systems Research Division, Korea Institute of Machinery & Materials
  • Jeong-Kyoon Suh Energy Systems Research Division, Korea Institute of Machinery & Materials

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