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논문검색

반도체 제조공정의 연기유동에 관한 연구

원문정보

A Study on Fire Hazard Analysis and Smoke Flowing for the Semiconductor Manufacturing Process

한수진, 강경식

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초록

영어

The power of semiconductor, Korea is continuously constructing semiconductor production line for keeping a front-runner status. however, studies and data about potential risks in semiconductor factory are still short. If fire does not initially suppressed, the fire causes a great damage. To decrease fire risk factors, in addition to fire fighting safety equipment, more important thing is how to design and construct fire protection system. The current fire protection codes about semiconductor factory come under functional law, and this law is short of consideration about particularity of factory. The existing prescriptive fire codes depending on experience compose without evident engineering verifications, thus equipments which is created by the current prescriptive fire code may bring about a variety of problems. For example, the design under the current regulation can not cope with the excessive investments, low efficiencies, and the diversifying construction designs and be applied to the quick changes of new technologies. Ergo, an optimal design for fire protection is to equip fire protection arrangements with condition and environment of production field. Manufacturing factory of semiconductors is a windowless airtight space. And for cleanliness, there exists strong flow of cooperation. Therefore, there is a need for fire safety design that meets the characteristic of a clean room. Accordingly, we are to derive smoke flow according to cooperation process within a clean room and construction plan of an optimal sensor system. In this study, in order to confirm the performance of proposed smoke-exhaust equipment and suggest efficient smoke exhaust device when there is a fire of 1MW of methane in the clean room of company H, we have implemented fire simulation using fluid dynamics computation.

목차

Abstract
 1. 서론
  1.1 연구목적
  1.2 연구방법
  1.3 연구내용
 2. Clean Room의 연기유동 분석
  2.1 화재시뮬레이션 (시험성 설계 평가의 개념)
  2.2 Clean Room 화재시뮬레이션
  2.3 시뮬레이션 결과 분석
 3. 결론 및 향후 과제
  3.1 연구의 요약
  3.2 향후 연구 방향
 4. 참고문헌

저자정보

  • 한수진 Han Soo Jin. (주)OSL ENG. 대표이사
  • 강경식 Kang Kyung Sik. 명지대학교 안전경영연구소 소장

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자료제공 : 네이버학술정보

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