원문정보
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초록
영어
The heterodyne laser interferometer has been widely used in linear displacement and precise measurement field. However the periodic nonlinearity that arises from incomplete laser sources and non-ideal optical components restricts the precise measurement at the nanometer level. In this paper, the total least squares (TLS) algorithm which can obtain optimal compensation parameters of nonlinearity is introduced. Using the TLS algorithm, the nonlinearity error is reduced and the measurement data can be more stabilized. The effectiveness of TLS approach is verified through the comparison of the experimental results with those obtained by a capacitance displacement sensor.
목차
Abstract
1. Introduction
2. Nonlinearity analysis in heterodyne laser interferometer
3. Adaptive nonlinearity compensation using TLS algorithm
4. Experimental results
5. Conclusion
References
1. Introduction
2. Nonlinearity analysis in heterodyne laser interferometer
3. Adaptive nonlinearity compensation using TLS algorithm
4. Experimental results
5. Conclusion
References
저자정보
참고문헌
자료제공 : 네이버학술정보