원문정보
초록
영어
We have manufactured a photoresist which has excellent dispersity and good applying property due to 330 cps of viscosity for environment-friendly and economical maskless screen plate making. And the photoresist applied on the screen stretched was exposed with mask by UV-LED light source so we could manufacture the photoresist which proper for the UV light source. And it was developed by air spray with 1.7 kgf/㎠ of injection pressure. Because of the excellence of power and resolution of the UV-LED light sourse, the pencil hardness and solvent resistance of curing photoresist film were excellent as those of conventional photoresist film. Moreover the 100㎛-width stripe image which has sharp edges was formed. So we confirmed a possibility of dry development process by air spray method.
목차
1. 서론
2. 실험
2-1. Maskless용 photoresist 제조
2-2. Maskless 용 노광 및 건식 현상 시스템
3. 결과 및 고찰
3-1. Maskless용 photoresist의 점도 거동
3-2. Maskless용 photoresist의 분산성
3-3. Photoresist 경화막의 경도
3-4. Phororesist 경화막의 내용제성
3-5. Maskless 스크린 제판의 패턴 형상 및 인쇄 결과
4. 결론
참고문헌