earticle

영어

Atomic Force Microscopes(AFM) is used to scan surfaces of a sample by measuring the interaction between atoms on the sample and the extremely sharp probe tip, which is produced by micromachining. AFM can be used as an inspection equipment for microelectronics industry and also requires a vibration-free environment to provide its proper functions. However, all of machine foundations including the wafer fab floor show the great amount of floor vibrations which can cause bad effects on the AFMs. This paper deals with the permissible floor vibration level for AFM at a given resolution.