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The triple helix is an innovation ecology theory based on the spiral interactive innovation relationship among universities, industry, and government. The Triple Helix Model has been widely developed and applied in theory and practice. China’s semiconductor industry lags behind the world’s advanced level, especially in basic chip manufacturing. The backwardness of chip technology has become the “national intellectual manufacturing” neck technology. We collected and organized the literature related to semiconductors from China, the United States, Korea, Japan, and the Taiwan region in the three core databases of the WOS (Web of Science) from 1990 to 2020 and divided the authors’ fields by address. We used the triple helix algorithm based on information theory to calculate the mutual information of the semiconductor innovation ecosystems of these five countries or regions in two and three dimensions. We found that Japanese and U.S. triple helix overlay in the semiconductor industry had a higher level of self-organization than China. However, China’s had a strong dependence on international cooperation. Moreover, the typical U-I-driven model emerged from the two-dimensional perspective in the U.S. and Japan. In contrast, the U-G-driven model emerged in China, Korea, and the Taiwan region, and is particularly prominent in China.
