초록 열기/닫기 버튼
It is crucial to investigate the mechanism of ultrashort pulse laser processing of ZrO2 ceramics to improve its processingaccuracy and efficiency. An ultrashort pulse laser was used to fabricate square grooves on the surface of ZrO2 ceramics. Thedepth, surface roughness, and surface topography of grooves were analyzed by the laser confocal microscope, optical profiler,and scanning electron microscope. The effects of different laser parameters on the material removal efficiency and processingquality of ZrO2 ceramics were studied. The results show that as the laser fluence increases, material removal efficiency firstincreases and then decreases, while the surface roughness first decreases and then increases. The heat accumulation effect issevere when using high repetition frequency, and the processed surface shows melt damage. As the pulse width increases from390fs to 6ps, the ablation threshold increases from 1.28 J/cm2 to 1.92 J/cm2. However, the material removal efficiency decreasesgradually. Furthermore, the material removal efficiency in burst mode significantly reduces due to the plasma shielding andredeposition of distinct granular deposits within the grooves. These findings can serve as a guide for controlling and optimizingthe process parameters of an ultrashort pulse laser processing of ZrO2 ceramics.
