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We report on the growth of high quality La0.7Ca0.3MnO3 (LCMO) epitaxial layers by pulsed laser deposition. The effect of substrate temperature on structural, magnetic and transport properties of LCMO has been investigated. Single-crystal epitaxial layers have been successfully grown on (100) LaAlO3 at relatively low substrate temperatures between 600 oC and 750 oC. It is confirmed that 700 oC is the most suitable substrate temperature. We investigated the effect of substrate temperature on the properties of LCMO epitaxial films.